Patent Assignment
Reel/Frame 012609/0134
Assignment of Assignor's Interest
Recorded: 2002-02-12
Received: 2002-02-28
Pages: 2
Assignors
BALDWIN, SCOTT
Executed: 2001-08-17
LUI, ANDREW
Executed: 2001-08-17
RICHARDSON, BRETT
Executed: 2001-08-17
WONG, VINCENT
Executed: 2001-08-17
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES
Covered Property
(1)
Endpoint determination of process residues in waferless auto clean process using optical emission spectroscopy
Application:
60/288,677 →