Patent Application
Provisional
App. No. 60/288,677
· Confirmation No. 9299
Endpoint determination of process residues in waferless auto clean process using optical emission spectroscopy
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-05-04 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-05-04 | SPEC |
Specification | 11 | View | |
| 2001-05-04 | CLM |
Claims | 3 | View | |
| 2001-05-04 | ABST |
Abstract | 1 | View | |
| 2001-05-04 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2001-05-04 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Vincent Wong
Pleasanton, CA
Andrew Lui
Fremont, CA
Brett Richardson
San Ramon, CA
Scott Baldwin
San Jose, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- LAM2P285+
- Confirmation No.
- 9299
Child
Claims priority from a provisional application
→
App. 10/138,980
· US 6,815,362
Filed 2002-05-03
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 10/876,442
Filed 2004-06-25
· Abandoned -- Failure to Respond to an Office Action
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-12
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Quick Facts
- App. No.
- 60/288,677
- Filed
- 2001-05-04
External Links