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App. No. 10/138,980 · Confirmation No. 6941

ENDPOINT DETERMINATION OF PROCESS RESIDUES IN WAFER-LESS AUTO CLEAN PROCESS USING OPTICAL EMISSION SPECTROSCOPY

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2013-12-13 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2004-06-29 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-06-29 LET. Miscellaneous Incoming Letter 1 View
2004-06-29 DRW Drawings-only black and white line drawings 10 View
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2004-04-14 1449 List of References cited by applicant and considered by examiner 2 View
2004-04-14 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-04-14 FWCLM Index of Claims 1 View
2004-04-14 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-02-23 CLM Claims 6 View
2004-02-23 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-11-17 CTNF Non-Final Rejection 8 View
2003-11-17 892 List of references cited by examiner 1 View
2003-11-17 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-17 FWCLM Index of Claims 1 View
2003-11-03 SRNT Examiner's search strategy and results 1 View
2003-10-09 ELC. Response to Election / Restriction Filed 1 View
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2002-08-15 PEFR Applicant Response to Pre-Exam Formalities Notice 4 View
2002-08-15 OATH Oath or Declaration filed 3 View
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2002-08-15 TRNA Transmittal of New Application 4 View
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2002-08-15 OATH Oath or Declaration filed 3 View
2002-08-12 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-06-10 PEFN Pre-Exam Formalities Notice 2 View
2002-05-08 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2002-05-03 FWCLM Index of Claims 1 View
2002-05-03 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-05-03 SRFW Search information including classification, databases and other search related notes 1 View
2002-05-03 TRNA Transmittal of New Application 3 View
2002-05-03 DRW Drawings-only black and white line drawings 10 View
2002-05-03 SPEC Specification 32 View
2002-05-03 CLM Claims 6 View
2002-05-03 ABST Abstract 1 View
2002-05-03 OATH Oath or Declaration filed 3 View
2002-05-03 WCLM Claims Worksheet (PTO-2022) 1 View
2002-05-03 WFEE Fee Worksheet (SB06) 1 View
2002-05-03 WFEE Fee Worksheet (SB06) 1 View
2002-05-03 TRNA Transmittal of New Application 3 View
2002-05-03 SPEC Specification 32 View
2002-05-03 CLM Claims 6 View
2002-05-03 ABST Abstract 1 View
2002-05-03 DRW Drawings-only black and white line drawings 10 View
2002-05-03 OATH Oath or Declaration filed 3 View
2002-05-03 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
10/138,980
Filed
2002-05-03
Granted
2004-11-09
Examiner
VINH, LAN
Art Unit
1765
PTA
-126 days