Patent Assignment
Reel/Frame 012874/0973
Assignment of Assignor's Interest
Recorded: 2002-05-03
Received: 2002-05-14
Pages: 2
Assignors
LUI, ANDREW
Executed: 2002-05-03
RICHARDSON, BRETT C.
Executed: 2002-05-03
WONG, VINCENT
Executed: 2002-05-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES
Covered Property
(1)
Endpoint Determination of Process Residues in Wafer-Less Auto Clean Process Using Optical Emission Spectroscopy
Application:
10/138,980 →