Patent Assignment
Reel/Frame 012609/0358
Assignment of Assignor's Interest
Recorded: 2002-02-14
Received: 2002-02-28
Pages: 3
Assignee
SCIENTIFIC SYSTEMS RESEARCH LIMITED
UNIT 3, HOWTH JUNCTION BUSINESS PARK, KILBARRACK DUBLIN 5, IEX, IRELAND
Covered Property
(1)
Fault Classification in a Plasma Process Chamber
Application:
10/076,803 →