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App. No. 10/076,803 · Confirmation No. 3372

FAULT CLASSIFICATION IN A PLASMA PROCESS CHAMBER

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2011-09-28 APP.FILE.REC Filing Receipt 3 View
2011-09-12 LET. Miscellaneous Incoming Letter 2 View
2011-09-12 C.AD Change of Address 2 View
2004-11-03 BIB Bibliographic Data Sheet 1 View
2004-09-23 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-09-23 C.AD Change of Address 1 View
2004-09-16 PA.. Power of Attorney 1 View
2004-08-25 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-08-25 NOA Notice of Allowance and Fees Due (PTOL-85) 5 View
2004-08-25 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-08-25 BIB Bibliographic Data Sheet 1 View
2004-08-25 FWCLM Index of Claims 1 View
2004-08-25 SRFW Search information including classification, databases and other search related notes 1 View
2004-08-07 SRNT Examiner's search strategy and results 3 View
2004-07-27 RCEX Request for Continued Examination (RCE) 1 View
2004-07-27 CLM Claims 6 View
2004-07-27 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-06-14 A.I. Informal or Non-Responsive Amendment 2 View
2004-06-14 CLM Claims 7 View
2004-06-14 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-05-07 C.AD Change of Address 1 View
2004-04-20 CTFR Final Rejection 11 View
2004-04-20 1449 List of References cited by applicant and considered by examiner 1 View
2004-04-20 FWCLM Index of Claims 1 View
2004-03-26 FWCLM Index of Claims 1 View
2004-03-22 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-03-22 ABST Abstract 1 View
2004-03-22 CLM Claims 4 View
2004-03-22 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2004-02-05 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-02-05 FOR Foreign Reference 19 View
2003-12-18 CTNF Non-Final Rejection 8 View
2003-12-18 892 List of references cited by examiner 1 View
2003-12-11 SRNT Examiner's search strategy and results 1 View
2002-02-14 TRNA Transmittal of New Application 1 View
2002-02-14 SPEC Specification 13 View
2002-02-14 CLM Claims 3 View
2002-02-14 ABST Abstract 1 View
2002-02-14 DRW Drawings-only black and white line drawings 5 View
2002-02-14 OATH Oath or Declaration filed 3 View
2002-02-14 LET. Miscellaneous Incoming Letter 1 View
2002-02-14 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 2 View
2002-02-14 SRFW Search information including classification, databases and other search related notes 2 View
2002-02-14 FWCLM Index of Claims 2 View
2002-02-14 TRNA Transmittal of New Application 1 View
2002-02-14 DRW Drawings-only black and white line drawings 5 View
2002-02-14 SPEC Specification 13 View
2002-02-14 ABST Abstract 1 View
2002-02-14 CLM Claims 3 View
2002-02-14 OATH Oath or Declaration filed 3 View
2002-02-14 WFEE Fee Worksheet (SB06) 1 View
2002-02-14 WFEE Fee Worksheet (SB06) 1 View
2002-02-14 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
App. No.
10/076,803
Filed
2002-02-14
Granted
2004-11-30
Pub. No.
US20030153989A1
Examiner
LE, JOHN H
Art Unit
2863
PTA
-4 days