Patent Assignment
Reel/Frame 026755/0613
Assignment of Assignor's Interest
Recorded: 2011-08-15
Pages: 4
Assignor
LAM RESEARCH INTERNATIONAL SARL
Executed: 2011-08-15
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Properties
(13)
Apparatus for Sensing Rf Current Delivered to a Plasma with Two Inductive Loops
Patent:
5,808,415 →
Application:
08/820,914 →
Apparatus for Sensing Rf Current Delivered to a Plasma with Two Inductive Loops
Patent:
6,061,006 →
Application:
09/094,883 →
Rf Current Sensor
Patent:
6,501,285 →
Application:
09/650,256 →
Method of Processing a High Frequency Signal Containing Multiple Fundamental Frequencies
Patent:
6,469,488 →
Application:
09/650,272 →
Method for Fault Identification in a Plasma Process
Patent:
6,441,620 →
Application:
09/650,277 →
Endpoint Detection in the Etching of Dielectric Layers
Fault Classification in a Plasma Process Chamber
Plasma Chamber Cleaning
Plasma Chamber Conditioning
Patent:
6,656,848 →
Application:
10/133,931 →
Method for Fault Detection in a Plasma Process
Method for Process Control of Semiconductor Manufactiring Equipment
Radio Frequency Langmuir Probe
Method for Transferring Process Control Models Between Plasma Processing Chambers
Related Assignments
(2)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 21, 2005
From: O'LEARY, KEVIN; MARTINEZ, FRANCISCO; CARBERRY, MARCUS
To: SCIENTIFIC SYSTEMS RESEARCH LIMITED
Reel/Frame 016714/0952 →
Assignment of Assignor's Interest
Mar 12, 2010
From: SCIENTIFIC SYSTEMS RESEARCH LIMITED
To: LAM RESEARCH INTERNATIONAL SARL
Reel/Frame 024066/0969 →