IP Library Granted Patent US 6,656,848
Granted Patent Utility
US 6,656,848 · Confirmation No. 3404

PLASMA CHAMBER CONDITIONING

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2011-09-20 WFEE Fee Worksheet (SB06) 1 View
2011-09-19 PETDEC Petition Decision 1 View
2011-08-22 PET.OP Petition for review by the Office of Petitions 2 View
2003-09-30 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-09-10 LET. Miscellaneous Incoming Letter 1 View
2003-09-10 DRW Drawings-only black and white line drawings 4 View
2002-04-26 TRNA Transmittal of New Application 1 View
2002-04-26 TRNA Transmittal of New Application 14 View
2002-04-26 CLM Claims 1 View
2002-04-26 ABST Abstract 1 View
2002-04-26 DRW Drawings-only black and white line drawings 4 View
2002-04-26 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,656,848
App. No.
10/133,931
Filed
2002-04-26
Granted
2003-12-02
Examiner
TRAN, BINH X
Art Unit
1765
PTA
0 days