Granted Patent
Utility
US 6,781,383
· Confirmation No. 1431
METHOD FOR FAULT DETECTION IN A PLASMA PROCESS
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-01-25 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2004-09-27 | COCIN |
Request for Certificate of Correction | 4 | View | |
| 2004-07-15 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-04-26 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-04-26 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2004-04-26 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-04-26 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-04-19 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2004-04-09 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-04-09 | FWCLM |
Index of Claims | 1 | View | |
| 2004-03-31 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2004-03-31 | SPEC |
Specification | 2 | View | |
| 2004-03-31 | CLM |
Claims | 2 | View | |
| 2004-03-31 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2004-03-31 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2003-12-30 | CTNF |
Non-Final Rejection | 5 | View | |
| 2003-12-30 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-12-30 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-12-30 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-12-12 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2002-11-15 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-11-15 | SPEC |
Specification | 15 | View | |
| 2002-11-15 | CLM |
Claims | 2 | View | |
| 2002-11-15 | ABST |
Abstract | 1 | View | |
| 2002-11-15 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2002-11-15 | OATH |
Oath or Declaration filed | 3 | View | |
| 2002-11-15 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-11-15 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2002-11-15 | SPEC |
Specification | 15 | View | |
| 2002-11-15 | CLM |
Claims | 2 | View | |
| 2002-11-15 | ABST |
Abstract | 1 | View | |
| 2002-11-15 | OATH |
Oath or Declaration filed | 3 | View | |
| 2002-11-15 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-11-15 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-11-15 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2002-11-15 | FRPR |
Certified Copy of Foreign Priority Application | 31 | View | |
| 2002-11-15 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
204/157.15
H01J37/32082
H01J37/32935
Prosecution
- Examiner
- PERT, EVAN T
- Art Unit
- 2829
- Customer No.
- 826
- Docket No.
- 044527/254963
- Confirmation No.
- 1431
Foreign Priority
2002/0773
·
2002-09-24
·
IRELAND
Publication
- Pub. No.
- US20040055868A1
- Pub. Date
- 2004-03-25
Patent Term Adjustment
-1days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-08-15
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-03-12
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-11-15
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Quick Facts
- Patent No.
- US 6,781,383
- App. No.
- 10/295,350
- Filed
- 2002-11-15
- Granted
- 2004-08-24
- Pub. No.
- US20040055868A1
- Examiner
- PERT, EVAN T
- Art Unit
- 2829
- PTA
- -1 days
External Links