Granted Patent
Utility
US 6,677,246
· Confirmation No. 6142
ENDPOINT DETECTION IN THE ETCHING OF DIELECTRIC LAYERS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-11-18 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-12-06 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-12-06 | SPEC |
Specification | 11 | View | |
| 2001-12-06 | CLM |
Claims | 2 | View | |
| 2001-12-06 | ABST |
Abstract | 1 | View | |
| 2001-12-06 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2001-12-06 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
John Scanlan
Waterford, IRELAND
Michael B. Hopkins
Dublin, IRELAND
Attorneys & Agents of Record
Classification
USPC
438/723
H10P50/283
H10W20/081
Prosecution
- Examiner
- CHEN, KIN CHAN
- Art Unit
- 1765
- Docket No.
- 610P
- Confirmation No.
- 6142
Foreign Priority
2001/0288
·
2000-03-23
·
IRELAND
Publication
- Pub. No.
- US20020048960A1
- Pub. Date
- 2002-04-25
Patent Term Adjustment
-6days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-08-15
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-03-12
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-12-06
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Quick Facts
- Patent No.
- US 6,677,246
- App. No.
- 10/021,324
- Filed
- 2001-12-06
- Granted
- 2004-01-13
- Pub. No.
- US20020048960A1
- Examiner
- CHEN, KIN CHAN
- Art Unit
- 1765
- PTA
- -6 days
External Links