IP Library Granted Patent US 6,677,246
Granted Patent Utility
US 6,677,246 · Confirmation No. 6142

ENDPOINT DETECTION IN THE ETCHING OF DIELECTRIC LAYERS

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Code Description Pages PDF
2003-11-18 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-12-06 TRNA Transmittal of New Application 1 View
2001-12-06 SPEC Specification 11 View
2001-12-06 CLM Claims 2 View
2001-12-06 ABST Abstract 1 View
2001-12-06 DRW Drawings-only black and white line drawings 7 View
2001-12-06 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,677,246
App. No.
10/021,324
Filed
2001-12-06
Granted
2004-01-13
Pub. No.
US20020048960A1
Art Unit
1765
PTA
-6 days