Patent Assignment
Reel/Frame 012619/0308
Assignment of Assignor's Interest
Recorded: 2002-02-13
Received: 2002-03-05
Pages: 5
Assignors
BOETTIGER, ULRICH C.
Executed: 2001-12-06
LIGHT, SCOTT L.
Executed: 2001-12-06
HICKMAN, CRAIG A.
Executed: 2001-12-07
RERICHA, WILLIAM T.
Executed: 2001-12-07
Assignee
MICRON TECHNOLOGY, INC.
8000 SOUTH FEDERAL WAY, BOISE, ID, 83706, UNITED STATES
Covered Property
(1)
Method and Apparatus for Irradiating a Microlithographic Substrate
Application:
09/945,167 →