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US 6,784,975 · Confirmation No. 1582

METHOD AND APPARATUS FOR IRRADIATING A MICROLITHOGRAPHIC SUBSTRATE

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2004-07-15 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-07-15 LET. Miscellaneous Incoming Letter 1 View
2004-04-16 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-16 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-16 1449 List of References cited by applicant and considered by examiner 2 View
2004-04-16 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2004-04-16 CLM Claims 1 View
2004-04-16 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-04-16 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-01 A.NE Response After Final Action 2 View
2004-04-01 CLM Claims 20 View
2004-04-01 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-03-10 CTFR Final Rejection 6 View
2004-03-10 892 List of references cited by examiner 1 View
2004-03-10 1449 List of References cited by applicant and considered by examiner 3 View
2004-03-10 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-24 WFEE Fee Worksheet (SB06) 1 View
2004-02-24 FWCLM Index of Claims 1 View
2004-02-13 EXIN Examiner Interview Summary Record (PTOL - 413) 4 View
2004-02-03 LET. Miscellaneous Incoming Letter 2 View
2004-02-03 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-02-02 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2004-02-02 SPEC Specification 1 View
2004-02-02 CLM Claims 23 View
2004-02-02 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2003-10-31 CTNF Non-Final Rejection 5 View
2003-10-31 1449 List of References cited by applicant and considered by examiner 3 View
2003-10-31 892 List of references cited by examiner 1 View
2003-10-31 SRFW Search information including classification, databases and other search related notes 1 View
2003-10-20 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2003-10-15 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2003-10-08 ELC. Response to Election / Restriction Filed 2 View
2003-10-08 CLM Claims 18 View
2003-10-08 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-09-25 CTRS Requirement for Restriction/Election 4 View
2002-11-21 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2002-04-03 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2002-01-30 OATH Oath or Declaration filed 3 View
2002-01-30 PA.. Power of Attorney 6 View
2002-01-30 LET. Miscellaneous Incoming Letter 4 View
2002-01-30 XT/ Extension of Time 2 View
2002-01-25 A.PE Preliminary Amendment 1 View
2002-01-25 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2001-10-09 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-08-30 TRNA Transmittal of New Application 1 View
2001-08-30 SPEC Specification 14 View
2001-08-30 CLM Claims 20 View
2001-08-30 ABST Abstract 1 View
2001-08-30 DRW Drawings-only black and white line drawings 5 View
2001-08-30 TRNA Transmittal of New Application 1 View
2001-08-30 SPEC Specification 14 View
2001-08-30 CLM Claims 20 View
2001-08-30 ABST Abstract 1 View
2001-08-30 DRW Drawings-only black and white line drawings 5 View
2001-08-30 WFEE Fee Worksheet (SB06) 1 View
2001-08-30 WCLM Claims Worksheet (PTO-2022) 1 View
2001-08-30 FWCLM Index of Claims 1 View
2001-08-30 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
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Quick Facts
Patent No.
US 6,784,975
App. No.
09/945,167
Filed
2001-08-30
Granted
2004-08-31
Pub. No.
US20030044693A1
Art Unit
2851
PTA
-119 days