Assignment of Assignor's Interest

Recorded: 2002-02-28 Received: 2002-03-07 Pages: 4

Assignors

NAKANO, AKIRA

Executed: 2002-02-06

OHMI, TADAHIRO

Executed: 2002-02-06

Assignees

ALPS ELECTRIC CO., LTD.

1-7 YUKIGAYA, OTSUKA-CHO, OTA-KU, TOKYO, JPX, JAPAN

OHMI, TADAHIRO

AOBA-KU, SENDAI-SHI, 2-1-17-301 KOMEGAFUKURO, MIYAGI-KEN, JPX, JAPAN

Covered Property (1)

Performance Evaluation Method for Plasma Processing Apparatus for Continuously Maintaining a Desired Performance Level

Application: 09/957,684 →