Granted Patent
Utility
US 6,795,796
· Confirmation No. 2601
PERFORMANCE EVALUATION METHOD FOR PLASMA PROCESSING APPARATUS FOR CONTINUOUSLY MAINTAINING A DESIRED PERFORMANCE LEVEL
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Code | Description | Pages | ||
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| 2004-07-19 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-04-13 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-04-13 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2004-04-13 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-04-13 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-02-20 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-02-20 | FWCLM |
Index of Claims | 1 | View | |
| 2004-01-16 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 3 | View | |
| 2004-01-16 | CLM |
Claims | 37 | View | |
| 2004-01-16 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2004-01-16 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2003-12-22 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 4 | View | |
| 2003-10-03 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-10-03 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2003-10-03 | CLM |
Claims | 37 | View | |
| 2003-10-03 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2003-10-03 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2003-10-03 | XT/ |
Extension of Time | 2 | View | |
| 2003-06-12 | CTNF |
Non-Final Rejection | 7 | View | |
| 2003-06-12 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-06-12 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-06-07 | SRNT |
Examiner's search strategy and results | 21 | View | |
| 2003-03-25 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-03-25 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2003-03-25 | CLM |
Claims | 1 | View | |
| 2003-03-25 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2003-03-25 | XT/ |
Extension of Time | 2 | View | |
| 2003-01-23 | CTRS |
Requirement for Restriction/Election | 7 | View | |
| 2002-02-28 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 3 | View | |
| 2002-02-28 | OATH |
Oath or Declaration filed | 4 | View | |
| 2002-02-28 | XT/ |
Extension of Time | 2 | View | |
| 2001-12-26 | FRPR |
Certified Copy of Foreign Priority Application | 2 | View | |
| 2001-10-29 | PEFN |
Pre-Exam Formalities Notice | 1 | View | |
| 2001-09-20 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-09-20 | SPEC |
Specification | 211 | View | |
| 2001-09-20 | CLM |
Claims | 55 | View | |
| 2001-09-20 | ABST |
Abstract | 1 | View | |
| 2001-09-20 | DRW |
Drawings-only black and white line drawings | 35 | View | |
| 2001-09-20 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2001-09-20 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2001-09-20 | FWCLM |
Index of Claims | 1 | View | |
| 2001-09-20 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-09-20 | DRW |
Drawings-only black and white line drawings | 35 | View | |
| 2001-09-20 | SPEC |
Specification | 211 | View | |
| 2001-09-20 | CLM |
Claims | 55 | View | |
| 2001-09-20 | ABST |
Abstract | 1 | View | |
| 2001-09-20 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-09-20 | FRPR |
Certified Copy of Foreign Priority Application | 124 | View | |
| 2001-09-20 | FRPR |
Certified Copy of Foreign Priority Application | 174 | View | |
| 2001-09-20 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2001-09-20 | ARTIFACT |
Artifact sheet indicating an item has been filed which cannot be scanned | 1 | View |
Inventors
Akira Nakano
Miyagi-ken, JAPAN
Tadahiro Ohmi
Miyagi-ken, JAPAN
Attorneys & Agents of Record
Classification
USPC
702/182
Prosecution
- Examiner
- WACHSMAN, HAL D
- Art Unit
- 2857
- Customer No.
- 757
- Docket No.
- 9281-4182
- Confirmation No.
- 2601
Foreign Priority
2000-289489
·
2000-09-22
·
JAPAN
2000-295086
·
2000-09-27
·
JAPAN
Publication
- Pub. No.
- US20020149317A1
- Pub. Date
- 2002-10-17
Patent Term Adjustment
-223days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-28
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Quick Facts
- Patent No.
- US 6,795,796
- App. No.
- 09/957,684
- Filed
- 2001-09-20
- Granted
- 2004-09-21
- Pub. No.
- US20020149317A1
- Examiner
- WACHSMAN, HAL D
- Art Unit
- 2857
- PTA
- -223 days
External Links