Patent Assignment
Reel/Frame 012639/0243
Assignment of Assignor's Interest
Recorded: 2002-02-20
Received: 2002-03-11
Pages: 3
Assignor
PARIKH, PRABODH J.
Executed: 2001-11-16
Assignee
SPEEDFAM-IPEC CORPORATION
305 NORTH 54TH STREET, CHANDLER, AZ, 85226, UNITED STATES
Covered Property
(1)
Method and Apparatus for Endpoint Detection During Chemical Mechanical Polishing
Application:
10/035,519 →