Granted Patent
Utility
US 6,586,337
· Confirmation No. 3078
METHOD AND APPARATUS FOR ENDPOINT DETECTION DURING CHEMICAL MECHANICAL POLISHING
Inventor:
Prabodh J. Parikh
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2009-06-29 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2001-11-09 | TRNA |
Transmittal of New Application | 4 | View | |
| 2001-11-09 | SPEC |
Specification | 22 | View | |
| 2001-11-09 | CLM |
Claims | 3 | View | |
| 2001-11-09 | ABST |
Abstract | 1 | View | |
| 2001-11-09 | DRW |
Drawings-only black and white line drawings | 10 | View |
Inventors
Prabodh J. Parikh
Tempe, AZ
Attorneys & Agents of Record
Classification
USPC
438/692
B24B37/013
B24B37/04
B24B49/12
B24D7/12
Prosecution
- Examiner
- DANG, PHUC T
- Art Unit
- 2818
- Customer No.
- 84387
- Docket No.
- 35013.3300
- Confirmation No.
- 3078
Publication
- Pub. No.
- US20030092269A1
- Pub. Date
- 2003-05-15
Patent Term Adjustment
-5days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2007-09-28
from
PARIKH, PRABODH J.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-20
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Quick Facts
- Patent No.
- US 6,586,337
- App. No.
- 10/035,519
- Filed
- 2001-11-09
- Granted
- 2003-07-01
- Pub. No.
- US20030092269A1
- Examiner
- DANG, PHUC T
- Art Unit
- 2818
- PTA
- -5 days
External Links