Patent Assignment
Reel/Frame 012643/0890
Assignment of Assignor's Interest
Recorded: 2002-02-20
Pages: 3
Assignors
YAMAZAKI, SHUNPEI
Executed: 2002-02-06
SEO, SATOSHI
Executed: 2002-02-06
SHIBATA, NORIKO
Executed: 2002-02-07
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398 HASE ATSUGI-SHI, KANAGAWA-KEN 243-0036, JAPAN
Covered Property
(1)
Method and Apparatus for Film Deposition