Patent Assignment
Reel/Frame 012645/0389
Assignment of Assignor's Interest
Recorded: 2002-02-26
Received: 2002-03-11
Pages: 3
Assignee
ADVANCED MICRO DEVICES, INC.
5204 E. BEN WHITE BLVD., AUSTIN, TX, 78741, UNITED STATES
Covered Property
(1)
Method of Detecting Degradation in Photolithography Processes Based Upon Scatterometric Measurements of Grating Structures, and a Device Comprising Such Structures
Application:
10/083,699 →