IP Library › Granted Patent US 6,643,008
Granted Patent Utility
US 6,643,008 · Confirmation No. 1551

METHOD OF DETECTING DEGRADATION IN PHOTOLITHOGRAPHY PROCESSES BASED UPON SCATTEROMETRIC MEASUREMENTS OF GRATING STRUCTURES, AND A DEVICE COMPRISING SUCH STRUCTURES

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2011-03-04 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2003-08-29 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-08-29 LET. Miscellaneous Incoming Letter 2 View
2002-02-26 TRNA Transmittal of New Application 3 View
2002-02-26 SPEC Specification 23 View
2002-02-26 CLM Claims 10 View
2002-02-26 ABST Abstract 1 View
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2002-02-26 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,643,008
App. No.
10/083,699
Filed
2002-02-26
Granted
2003-11-04
Art Unit
2877
PTA
0 days