Assignment of Assignor's Interest

Recorded: 2002-02-25 Received: 2002-03-12 Pages: 2

Assignors

DE LA LLERA, ANTHONY

Executed: 2002-01-24

LUONG, TONY

Executed: 2002-01-24

NGUYEN, TUAN A.

Executed: 2002-01-24

PHAM, XUYEN

Executed: 2002-01-24

SIU, ANDREW

Executed: 2002-01-24

Assignee

LAM RESEARCH CORPORATION

4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES

Covered Property (1)

Method and Apparatus for Applying Downward Force on Wafer During Cmp

Application: 10/033,671 →