Assignment of Assignor's Interest

Recorded: 2002-03-01 Received: 2002-03-14 Pages: 3

Assignors

EBERT, MARTIN

Executed: 2002-01-14

CHEN, LI

Executed: 2002-01-25

Assignee

THERMA-WAVE, INC.

1250 RELIANCE WAY, FREMONT, CA, 94539, UNITED STATES

Covered Property (1)

Multiple Beam Ellipsometer

Application: 10/042,592 →