IP Library › Granted Patent US 6,798,512
Granted Patent Utility
US 6,798,512 · Confirmation No. 6617

MULTIPLE BEAM ELLIPSOMETER

Inventors: Martin Ebert, Li Chen
Patented Case View Patent ↗ View Publication ↗
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2004-12-16 C.AD Change of Address 1 View
2004-09-01 BIB Bibliographic Data Sheet 1 View
2004-07-19 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-07-19 LET. Miscellaneous Incoming Letter 1 View
2004-07-19 PA.. Power of Attorney 1 View
2004-06-16 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-06-16 OATH Oath or Declaration filed 5 View
2004-06-03 RUSH Printer Query form, used by the publications branch 1 View
2004-05-06 NOA Notice of Allowance and Fees Due (PTOL-85) 6 View
2004-05-06 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-05-06 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-06 FWCLM Index of Claims 1 View
2004-02-20 WFEE Fee Worksheet (SB06) 1 View
2004-01-20 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-01-20 CLM Claims 5 View
2004-01-20 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-01-20 LET. Miscellaneous Incoming Letter 2 View
2004-01-20 DRW Drawings-only black and white line drawings 14 View
2003-12-11 CTNF Non-Final Rejection 6 View
2003-12-11 1449 List of References cited by applicant and considered by examiner 2 View
2003-12-11 892 List of references cited by examiner 1 View
2003-12-11 FWCLM Index of Claims 1 View
2003-12-11 SRFW Search information including classification, databases and other search related notes 1 View
2003-12-11 SRNT Examiner's search strategy and results 1 View
2003-03-17 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-01-18 FOR Foreign Reference 30 View
2003-01-18 FOR Foreign Reference 6 View
2003-01-18 FOR Foreign Reference 56 View
2003-01-16 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2003-01-16 FOR Foreign Reference 1 View
2003-01-16 FOR Foreign Reference 1 View
2003-01-16 FOR Foreign Reference 16 View
2003-01-16 FOR Foreign Reference 9 View
2003-01-16 FOR Foreign Reference 7 View
2002-06-06 PA.. Power of Attorney 3 View
2002-03-01 LET. Miscellaneous Incoming Letter 4 View
2002-01-09 TRNA Transmittal of New Application 4 View
2002-01-09 SPEC Specification 17 View
2002-01-09 CLM Claims 5 View
2002-01-09 ABST Abstract 1 View
2002-01-09 DRW Drawings-only black and white line drawings 14 View
2002-01-09 OATH Oath or Declaration filed 2 View
2002-01-09 WCLM Claims Worksheet (PTO-2022) 1 View
2002-01-09 WFEE Fee Worksheet (SB06) 1 View
2002-01-09 WFEE Fee Worksheet (SB06) 1 View
2002-01-09 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
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Quick Facts
Patent No.
US 6,798,512
App. No.
10/042,592
Filed
2002-01-09
Granted
2004-09-28
Pub. No.
US20030030806A1
Art Unit
2877
PTA
-105 days