Patent Assignment
Reel/Frame 012663/0722
Assignment of Assignor's Interest
Recorded: 2002-03-04
Pages: 2
Assignors
SHIOMI, JUNICHI
Executed: 2002-02-14
FUJIMOTO, HIROKI
Executed: 2002-02-15
NISHIHARA, EIJI
Executed: 2002-02-14
IMAMURA, ATSUSHI
Executed: 2002-02-14
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
HORIKAWA-DORI, KAMIKYO-KU, 1-1, TENJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME, KYOTO, JAPAN
Covered Property
(1)
Detection of an End Point of Polishing a Substrate