Patent Assignment
Reel/Frame 012677/0642
Assignment of Assignor's Interest
Recorded: 2002-03-06
Received: 2002-03-19
Pages: 2
Assignors
UMEMOTO, TSUYOSHI
Executed: 2002-02-18
OOGOSHI, YASUO
Executed: 2002-02-19
TAKAHASHI, YOUJI
Executed: 2002-02-19
KANEKIYO, TADAMITSU
Executed: 2002-02-21
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHINBASHI 1-CHOME, MINATO-KU, TOKYO, JPX, JAPAN
Covered Property
(1)
High-Frequency Power Supply Apparatus for Plasma Generation Apparatus
Application:
10/090,757 →