IP Library Granted Patent US 6,586,887
Granted Patent Utility
US 6,586,887 · Confirmation No. 7176

HIGH-FREQUENCY POWER SUPPLY APPARATUS FOR PLASMA GENERATION APPARATUS

Patented Case View Patent ↗
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Code Description Pages PDF
2002-03-06 TRNA Transmittal of New Application 2 View
2002-03-06 SPEC Specification 18 View
2002-03-06 CLM Claims 3 View
2002-03-06 ABST Abstract 1 View
2002-03-06 DRW Drawings-only black and white line drawings 8 View
2002-03-06 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,586,887
App. No.
10/090,757
Filed
2002-03-06
Granted
2003-07-01
Art Unit
2821
PTA
0 days