Patent Assignment
Reel/Frame 012688/0846
Assignment of Assignor's Interest
Recorded: 2002-03-08
Received: 2002-03-21
Pages: 4
Assignors
CHO, SEONGHUN
Executed: 2002-03-06
CHOU, YU-YU
Executed: 2002-03-06
WU, SHAO-PO
Executed: 2002-03-06
Assignee
NUMERICAL TECHNOLOGIES, INC.
70 WEST PLUMERIA DRIVE, SAN JOSE, CA, 95134, UNITED STATES
Covered Property
(1)
Facilitating an Adjustable Level of Phase Shifting During an Optical Lithography Process for Manufacturing an Integrated Circuit
Application:
10/094,487 →