Granted Patent
Utility
US 6,605,481
· Confirmation No. 3562
FACILITATING AN ADJUSTABLE LEVEL OF PHASE SHIFTING DURING AN OPTICAL LITHOGRAPHY PROCESS FOR MANUFACTURING AN INTEGRATED CIRCUIT
Patented Case
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2011-08-04 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2002-03-08 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-03-08 | SPEC |
Specification | 14 | View | |
| 2002-03-08 | CLM |
Claims | 10 | View | |
| 2002-03-08 | ABST |
Abstract | 1 | View | |
| 2002-03-08 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2002-03-08 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
438/14
G03F7/70466
G03F1/26
Prosecution
- Examiner
- THOMPSON, CRAIG
- Art Unit
- 2813
- Customer No.
- 30185
- Docket No.
- NMTC-0758
- Confirmation No.
- 3562
Patent Term Adjustment
0days
No related applications found.
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNOR DOCUMENT DATE SHOULD BE 12/20/2004 PREVIOUSLY RECORDED ON REEL 023736 FRAME 0275. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT OF ASSIGNORS INTEREST.
Recorded 2016-03-10
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-05
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2005-02-04
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-03-08
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Quick Facts
- Patent No.
- US 6,605,481
- App. No.
- 10/094,487
- Filed
- 2002-03-08
- Granted
- 2003-08-12
- Examiner
- THOMPSON, CRAIG
- Art Unit
- 2813
- PTA
- 0 days
External Links