Patent Assignment
Reel/Frame 012700/0066
Assignment of Assignor's Interest
Recorded: 2002-03-15
Pages: 3
Assignor
TOGAWA, TETSUJI
Executed: 2002-02-01
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Polishing Apparatus