Patent Assignment
Reel/Frame 012719/0437
Assignment of Assignor's Interest
Recorded: 2002-03-12
Received: 2002-03-29
Pages: 2
Assignors
INOBE, TAKAMASA
Executed: 2001-11-01
MARUME, YASUHIRO
Executed: 2001-11-01
OTANI, MASAKI
Executed: 2001-11-01
SATO, YASUHIRO
Executed: 2001-11-01
WATANABE, TOSHIYUKI
Executed: 2001-11-01
Assignees
MITSUBISHI DENKI KABUSHIKI KAISHA
CHIYODA-KU, 2-3, MARUNOUCHI 2-CHOME, TOKYO 100-8310, JPX, JAPAN
RYODEN SEMICONDUCTOR SYSTEM ENGINEERING CORPORATION
CHIYODA-KU, 4-1, MIZUHARA, ITAMI-SHI, HYOGO 664-0005, JPX, JAPAN
Covered Property
(1)
Apparatus and Method for Controlling Semiconductor Manufacturing System Utilizing Recycled Wafers
Application:
10/095,040 →