Patent Application
Utility
App. No. 10/095,040
· Confirmation No. 4054
APPARATUS AND METHOD FOR CONTROLLING SEMICONDUCTOR MANUFACTURING SYSTEM UTILIZING RECYCLED WAFERS
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-03-12 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-03-12 | SPEC |
Specification | 20 | View | |
| 2002-03-12 | CLM |
Claims | 7 | View | |
| 2002-03-12 | ABST |
Abstract | 1 | View | |
| 2002-03-12 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2002-03-12 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Yasuhiro Marume
Hyogo, JAPAN
Toshiyuki Watanabe
Hyogo, JAPAN
Masaki Otani
Hyogo, JAPAN
Takamasa Inobe
Hyogo, JAPAN
Yasuhiro Sato
Hyogo, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/14
H10P74/23
Prosecution
- Examiner
- LUK, OLIVIA T
- Art Unit
- 2812
- Docket No.
- 57454-478
- Confirmation No.
- 4054
Foreign Priority
2001-206275(P)
·
2001-07-06
·
JAPAN
Publication
- Pub. No.
- US20030009256A1
- Pub. Date
- 2003-01-09
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-03-18
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-03-12
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Quick Facts
- App. No.
- 10/095,040
- Filed
- 2002-03-12
- Granted
- 2003-07-15
- Pub. No.
- US20030009256A1
- Examiner
- LUK, OLIVIA T
- Art Unit
- 2812
- PTA
- 0 days
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