Patent Assignment
Reel/Frame 012739/0918
Assignment of Assignor's Interest
Recorded: 2002-04-01
Pages: 2
Assignors
DHINDSA, RAJINDER
Executed: 2002-03-05
ASAN, MUKUND SRINIV
Executed: 2002-03-06
LENZ, ERIC
Executed: 2002-03-07
LI, LUMIN
Executed: 2002-03-05
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Plasma Processor in Plasma Confinement Region Within a Vacuum Chamber