Patent Assignment
Reel/Frame 012749/0107
Assignment of Assignor's Interest
Recorded: 2002-03-29
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method and Apparatus for Heating Polishing Pad
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.