Patent Assignment
Reel/Frame 012759/0747
Assignment of Assignor's Interest
Recorded: 2002-04-04
Received: 2002-04-10
Pages: 2
Assignor
BRIGHT, NICOLAS J.
Executed: 2002-03-16
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES
Covered Property
(1)
Apparatus and Methods for Controlling Wafer Temperature in Chemical Mechanical Polishing
Application:
10/033,455 →