Patent Assignment
Reel/Frame 012759/0773
Assignment of Assignor's Interest
Recorded: 2002-04-04
Received: 2002-04-10
Pages: 8
Assignors
STEIMAN, MICHAEL D.
Executed: 2002-03-21
STASIEWICZ, PAUL H., JR.
Executed: 2002-03-22
ENGDAHL, ERIK H.
Executed: 2002-03-25
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES
Covered Properties
(2)
Low Friction Gimbaled Substrate Holder for Cmp Apparatus
Application:
10/013,429 →
Wireless Security and Access Device
Application:
10/002,819 →