IP Library Patent Application 10013429
Patent Application Utility
App. No. 10/013,429 · Confirmation No. 3527

LOW FRICTION GIMBALED SUBSTRATE HOLDER FOR CMP APPARATUS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Code Description Pages PDF
2004-02-23 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-02-23 LET. Miscellaneous Incoming Letter 2 View
2004-02-23 DRW Drawings-only black and white line drawings 3 View
2001-12-07 TRNA Transmittal of New Application 1 View
2001-12-07 SPEC Specification 12 View
2001-12-07 CLM Claims 5 View
2001-12-07 ABST Abstract 1 View
2001-12-07 DRW Drawings-only black and white line drawings 3 View
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Quick Facts
App. No.
10/013,429
Filed
2001-12-07
Granted
2004-04-06
Pub. No.
US20030109208A1
Art Unit
3723
PTA
-139 days