Patent Assignment
Reel/Frame 012761/0242
Assignment of Assignor's Interest
Recorded: 2002-03-29
Pages: 19
Assignors
HOFFMAN, DANIEL J
Executed: 2002-02-22
YIN, GERALD ZHEYAO
Executed: 2002-02-21
YE, YAN
Executed: 2002-03-15
KATZ, DAN
Executed: 2002-03-11
BUCHBERGER, DOUGLAS A, JR
Executed: 2002-02-21
ZHAO, XIAOYE
Executed: 2002-02-22
CHIANG, KANG-LIE
Executed: 2002-02-21
HAGEN, ROBERT B
Executed: 2002-02-22
MILLER, MATTHEW L
Executed: 2002-02-25
Assignee
APPLIED MATERIALS, INC
PATENT COUNSEL, M/S 2061, P.O. BOX 450-A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Plasma Reactor with Overhead Rf Electrode Tuned to the Plasma with Arcing Suppression