Patent Assignment
Reel/Frame 012788/0467
Assignment of Assignor's Interest
Recorded: 2002-04-04
Received: 2002-04-18
Pages: 4
Assignors
BABCOKE, JASON E.
Executed: 2002-03-12
BROWN, JEFFREY A.
Executed: 2002-03-12
CHIANG, TONY P.
Executed: 2002-03-12
LEESER, KARL F.
Executed: 2002-03-12
Assignee
ANGSTRON SYSTEMS, INC.
3350 SCOTT BOULEVARD, BUILDING 62, SANTA CLARA, CA, 95054, UNITED STATES
Covered Property
(1)
Substrate temperature control in an ALD reactor
Application:
10/000,825 →