IP Library › Patent Application 10000825
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App. No. 10/000,825 · Confirmation No. 1439

Substrate temperature control in an ALD reactor

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2005-02-11 ABN Abandonment 2 View
2004-05-18 CTFR Final Rejection 8 View
2004-05-18 892 List of references cited by examiner 1 View
2004-05-18 FWCLM Index of Claims 1 View
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2004-03-29 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-03-29 CLM Claims 6 View
2004-03-29 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-03-29 XT/ Extension of Time 2 View
2003-10-28 CTNF Non-Final Rejection 7 View
2003-10-28 892 List of references cited by examiner 1 View
2003-10-28 1449 List of References cited by applicant and considered by examiner 5 View
2003-10-21 SRNT Examiner's search strategy and results 2 View
2003-04-08 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
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2002-01-09 FOR Foreign Reference 24 View
2001-12-19 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2001-12-19 CLM Claims 4 View
2001-12-19 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2001-12-19 LET. Miscellaneous Incoming Letter 1 View
2001-10-24 TRNA Transmittal of New Application 1 View
2001-10-24 SPEC Specification 51 View
2001-10-24 CLM Claims 1 View
2001-10-24 ABST Abstract 1 View
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2001-10-24 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-10-24 SRFW Search information including classification, databases and other search related notes 1 View
2001-10-24 FWCLM Index of Claims 1 View
2001-10-24 TRNA Transmittal of New Application 1 View
2001-10-24 DRW Drawings-only black and white line drawings 40 View
2001-10-24 SPEC Specification 51 View
2001-10-24 CLM Claims 1 View
2001-10-24 ABST Abstract 1 View
2001-10-24 OATH Oath or Declaration filed 3 View
2001-10-24 WFEE Fee Worksheet (SB06) 1 View
2001-10-24 WFEE Fee Worksheet (SB06) 1 View
2001-10-24 WCLM Claims Worksheet (PTO-2022) 1 View
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2001-10-24 FOR Foreign Reference 14 View
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Quick Facts
App. No.
10/000,825
Filed
2001-10-24
Pub. No.
US20020144786A1
Art Unit
1763