IP Library › Granted Patent US 6,800,173
Granted Patent Utility
US 6,800,173 · Confirmation No. 7804

VARIABLE GAS CONDUCTANCE CONTROL FOR A PROCESS CHAMBER

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2009-01-12 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2009-01-06 PA.. Power of Attorney 2 View
2008-11-20 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2004-05-24 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-05-24 LET. Miscellaneous Incoming Letter 2 View
2004-05-24 DRW Drawings-only black and white line drawings 40 View
2004-05-18 RUSH Printer Query form, used by the publications branch 1 View
2004-05-18 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-05-18 1449 List of References cited by applicant and considered by examiner 1 View
2004-04-14 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-14 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-14 1449 List of References cited by applicant and considered by examiner 4 View
2004-04-14 892 List of references cited by examiner 1 View
2004-04-14 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-04-14 FWCLM Index of Claims 1 View
2004-04-14 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-14 A.PE Preliminary Amendment 1 View
2004-04-14 CLM Claims 6 View
2004-04-06 SRNT Examiner's search strategy and results 5 View
2003-08-21 ELC. Response to Election / Restriction Filed 3 View
2003-07-21 CTRS Requirement for Restriction/Election 4 View
2003-03-21 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2003-02-28 PA.. Power of Attorney 3 View
2002-12-20 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-07-19 C.AD Change of Address 1 View
2002-03-27 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-03-04 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-03-01 A.PE Preliminary Amendment 2 View
2002-03-01 CLM Claims 6 View
2002-03-01 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2002-01-09 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-01-09 FOR Foreign Reference 24 View
2001-07-09 TRNA Transmittal of New Application 1 View
2001-07-09 SPEC Specification 49 View
2001-07-09 CLM Claims 5 View
2001-07-09 ABST Abstract 1 View
2001-07-09 DRW Drawings-only black and white line drawings 40 View
2001-07-09 OATH Oath or Declaration filed 3 View
2001-07-09 TRNA Transmittal of New Application 1 View
2001-07-09 SRFW Search information including classification, databases and other search related notes 1 View
2001-07-09 FWCLM Index of Claims 1 View
2001-07-09 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-07-09 WFEE Fee Worksheet (SB06) 1 View
2001-07-09 WFEE Fee Worksheet (SB06) 1 View
2001-07-09 SPEC Specification 49 View
2001-07-09 CLM Claims 5 View
2001-07-09 ABST Abstract 1 View
2001-07-09 OATH Oath or Declaration filed 3 View
2001-07-09 DRW Drawings-only black and white line drawings 40 View
2001-07-09 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2001-07-09 FOR Foreign Reference 14 View
2001-07-09 FOR Foreign Reference 13 View
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Quick Facts
Patent No.
US 6,800,173
App. No.
09/902,080
Filed
2001-07-09
Granted
2004-10-05
Pub. No.
US20020076490A1
Art Unit
1763
PTA
-120 days