Patent Application
Provisional
App. No. 60/281,628
· Confirmation No. 5443
Reactor for atomic layer deposition
Provisional Application Expired
Inventors
Tony P. Chiang
Santa Clara, CA
Karl F. Leeser
Sunnyvale, CA
Jeffrey A. Brown
San Francisco, CA
Jason E. Babcoke
Menlo Park, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- M-11466 V1 US
- Confirmation No.
- 5443
Child
Claims priority from a provisional application
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App. 10/027,592
· US 7,189,432
Filed 2001-12-19
· Patented Case
Child
Claims priority from a provisional application
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App. 09/999,532
Filed 2001-10-24
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
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App. 10/004,488
Filed 2001-10-24
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
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App. 09/999,636
· US 6,630,201
Filed 2001-10-24
· Patented Case
Child
Claims priority from a provisional application
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App. 09/999,499
Filed 2001-10-24
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
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App. 10/921,604
· US 7,806,983
Filed 2004-08-18
· Patented Case
Child
Claims priority from a provisional application
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App. 10/930,536
· US 7,318,869
Filed 2004-08-30
· Patented Case
Child
PCT
is a Continuation of
→
PCT/US2002/009999
Filed 2002-03-27
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
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App. 09/902,080
· US 6,800,173
Filed 2001-07-09
· Patented Case
Child
Claims priority from a provisional application
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App. 09/970,867
Filed 2001-10-03
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
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App. 10/000,825
Filed 2001-10-24
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
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App. 10/000,382
Filed 2001-10-24
· Abandoned -- Failure to Respond to an Office Action
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/281,628
- Filed
- 2001-04-05
External Links