Patent Assignment
Reel/Frame 012791/0185
Assignment of Assignor's Interest
Recorded: 2002-04-08
Received: 2002-04-15
Pages: 4
Assignors
CHANG, FANG-CHENG
Executed: 2002-04-05
PIERRAT, CHRISTPHE
Executed: 2002-04-05
WANG, YAO-TING
Executed: 2002-04-05
Assignee
NUMERICAL TECHNOLOGIES, INC.
70 WEST PLUMERIA DRIVE, SAN JOSE, CA, 95134, UNITED STATES
Covered Property
(1)
Method and Apparatus for Exposing a Wafer Using Multiple Masks During an Integrated Circuit Manufacturing Process
Application:
10/117,838 →