IP Library › Granted Patent US 6,795,168
Granted Patent Utility
US 6,795,168 · Confirmation No. 6565

METHOD AND APPARATUS FOR EXPOSING A WAFER USING MULTIPLE MASKS DURING AN INTEGRATED CIRCUIT MANUFACTURING PROCESS

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Quick Facts
Patent No.
US 6,795,168
App. No.
10/117,838
Filed
2002-04-08
Granted
2004-09-21
Pub. No.
US20030190762A1
Examiner
NGUYEN, HUNG
Art Unit
2851
PTA
0 days