Patent Assignment
Reel/Frame 012811/0500
Assignment of Assignor's Interest
Recorded: 2002-04-17
Pages: 2
Assignors
NAKAMOTO, SHIGERU
Executed: 2002-03-25
KONDO, HIDEAKI
Executed: 2002-03-27
ARIMA, JUNTARO
Executed: 2002-04-01
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHINBASHI, 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Semiconductor Manufacturing Apparatus and Its Diagnosis Apparatus and Operating System