Patent Assignment
Reel/Frame 012819/0843
Assignment of Assignor's Interest
Recorded: 2002-04-22
Pages: 2
Assignors
YAMAMOTO, HIDEYUKI
Executed: 2002-02-28
IKUHARA, SHOJI
Executed: 2002-02-26
KAGOSHIMA, AKIRA
Executed: 2002-02-26
SHIRAISHI, DAISUKE
Executed: 2002-02-27
TANAKA, JUNICHI
Executed: 2002-03-02
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.