Patent Assignment
Reel/Frame 012821/0874
Assignment of Assignor's Interest
Recorded: 2002-04-16
Pages: 3
Assignors
BIRANG, MANOOCHER
Executed: 2002-04-15
SWEDEK, BOGUSLAW A.
Executed: 2002-04-11
KIM, HYEONG-CHEOL
Executed: 2002-04-11
Assignee
APPLIED MATERIALS, INC.
MS 2061, PO BOX 450A, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method and Apparatus of Eddy Current Monitoring for Chemical Mechanical Polishing