Patent Assignment
Reel/Frame 012827/0439
Assignment of Assignor's Interest
Recorded: 2002-04-19
Pages: 3
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Laser Irradiating Apparatus and Method of Manufacturing Semiconductor Apparatus