Patent Assignment
Reel/Frame 012833/0557
Assignment of Assignor's Interest
Recorded: 2002-04-22
Received: 2002-05-01
Pages: 8
Assignors
JOHNSON, KENNETH C.
Executed: 2002-04-03
SEZGINER, ABDURRAHMAN
Executed: 2002-04-03
STANKE, FRED E.
Executed: 2002-04-03
Assignee
THERMA-WAVE, INC. A DELAWARE CORPORATION
1250 RELIANCE WAY, FREMONT, CA, 94539, UNITED STATES
Covered Property
(1)
Overlay Alignment Metrology Using Diffraction Gratings
Application:
10/074,561 →