IP Library › Granted Patent US 6,819,426
Granted Patent Utility
US 6,819,426 · Confirmation No. 6547

OVERLAY ALIGNMENT METROLOGY USING DIFFRACTION GRATINGS

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2004-08-11 NOA Notice of Allowance and Fees Due (PTOL-85) 8 View
2004-08-11 1449 List of References cited by applicant and considered by examiner 2 View
2004-08-11 IMIS Miscellaneous Internal Document 1 View
2004-08-11 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-08-11 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-08-05 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-07-26 RUSH Printer Query form, used by the publications branch 3 View
2004-05-19 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-19 NOA Notice of Allowance and Fees Due (PTOL-85) 7 View
2004-05-19 1449 List of References cited by applicant and considered by examiner 1 View
2004-05-19 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-03-15 WFEE Fee Worksheet (SB06) 1 View
2004-03-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-03-08 CLM Claims 11 View
2004-03-08 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-03-08 LET. Miscellaneous Incoming Letter 3 View
2004-03-08 IDS Information Disclosure Statement (IDS) Form (SB08) 6 View
2004-03-08 FOR Foreign Reference 2 View
2004-03-08 FOR Foreign Reference 16 View
2004-03-08 FOR Foreign Reference 49 View
2004-03-08 FOR Foreign Reference 20 View
2003-12-22 CTNF Non-Final Rejection 5 View
2003-12-22 892 List of references cited by examiner 1 View
2003-12-22 1449 List of References cited by applicant and considered by examiner 2 View
2003-12-22 FWCLM Index of Claims 1 View
2003-12-22 SRFW Search information including classification, databases and other search related notes 1 View
2003-07-28 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2003-07-28 FOR Foreign Reference 16 View
2003-07-28 FOR Foreign Reference 65 View
2003-07-28 FOR Foreign Reference 11 View
2003-04-25 N570 Communication - Re: Power of Attorney (PTOL-308) 2 View
2003-04-14 PA.. Power of Attorney 2 View
2002-12-26 LET. Miscellaneous Incoming Letter 2 View
2002-12-26 A.PE Preliminary Amendment 1 View
2002-12-26 CLM Claims 1 View
2002-12-26 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2002-09-03 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2002-09-03 FOR Foreign Reference 65 View
2002-05-06 LET. Miscellaneous Incoming Letter 1 View
2002-04-22 OATH Oath or Declaration filed 3 View
2002-04-22 LET. Miscellaneous Incoming Letter 9 View
2002-04-02 PEFN Pre-Exam Formalities Notice 1 View
2002-02-12 TRNA Transmittal of New Application 3 View
2002-02-12 SPEC Specification 39 View
2002-02-12 CLM Claims 8 View
2002-02-12 ABST Abstract 1 View
2002-02-12 DRW Drawings-only black and white line drawings 25 View
2002-02-12 TRNA Transmittal of New Application 1 View
2002-02-12 WCLM Claims Worksheet (PTO-2022) 1 View
2002-02-12 WFEE Fee Worksheet (SB06) 1 View
2002-02-12 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,819,426
App. No.
10/074,561
Filed
2002-02-12
Granted
2004-11-16
Pub. No.
US20020158193A1
Art Unit
2877
PTA
0 days