Patent Application
Provisional
App. No. 60/268,485
· Confirmation No. 1773
Metrology of overlay alignment using diffraction gratings
Provisional Application Expired
Inventors
Attorneys & Agents of Record
Prosecution
- Examiner
- TEST_NO, TEST_NO
- Customer No.
- 3897
- Docket No.
- SEN-015 PRV
- Confirmation No.
- 1773
Child
Claims priority from a provisional application
→
App. 10/074,561
· US 6,819,426
Filed 2002-02-12
· Patented Case
Child
Claims priority from a provisional application
→
App. 10/917,219
· US 7,042,569
Filed 2004-08-12
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2002/004190
Filed 2002-02-12
· RO PROCESSING COMPLETED-PLACED IN STORAGE
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/268,485
- Filed
- 2001-02-12
- Examiner
- TEST_NO, TEST_NO
External Links