Patent Assignment
Reel/Frame 012852/0519
Change of Name
Recorded: 2002-05-02
Received: 2002-05-08
Pages: 3
Assignor
SURFACE TECHNOLOGY SYSTEMS LIMITED
Executed: 2000-11-06
Assignee
SURFACE TECHNOLOGY SYSTEMS PLC
IMPERIAL PARK, NEWPORT, GWENT, GBX, NP10, UNITED KINGDOM
Covered Properties
(5)
Plasma Processing Apparatus
Application:
09/895,169 →
Plasma Processing Apparatus
Application:
09/884,460 →
Method and Apparatus for Dechucking a Substrate from an Electrostatic Chuck
Application:
09/719,500 →
Method and Apparatus for Anisotropic Etching
Application:
09/744,212 →
Gas Generation System
Application:
09/674,659 →